Lam 9600 ptx
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Lam 9600 ptx
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TīmeklisThese Pfeiffer Vacuum INTERF.M4 LAM 9600 PTX 2LAM7 have part number 108440, are new, and come with full Pfeiffer Vacuum warranty. The Pfeiffer Adixen medium … TīmeklisLAM RESEARCH Alliance A6 9608 PTX. ID #9266046. Etcher, 8" Integrated gas panel PM1: Microwave PM2: 9600 PTX PM3:9600 PTX PM4: Microwave PM5: Aligner PM6: Cool station Electrostatic chuck …
TīmeklisLam 9600 plasma etch tool. The goal of this process is to etch the TiN/Al - 0.5% Cu/TiN/oxide stack with an inductively coupled BCl 3/Cl 2 plasma. The key parameters of interest are the etch Al line width reduction relative to the incoming resist line width, etch uniformity across the wafer, and loss of the underlying oxide due to over etch. TīmeklisCAE finds the best deals on used LAM RESEARCH TCP 9600 PTX. We’re accountable for every transaction — CAE will seek to collect as much information as you require to ensure that you receive the equipment in the condition that you are expecting. Send us your request to buy a used LAM RESEARCH TCP 9600 PTX and we will contact you …
TīmeklisLAM RESEARCH Alliance 9600 PTX 1997 vintage. ID #9233428. Etcher, 8" Transfer chamber: VCE Type: LIP Seal Aligner: 001-4130-03 Transfer robot: BROOKS Magantran 7 ARM Type: Dual thin blade Rocker valve TīmeklisLAM 9600, TCP Metal Etch System Check for Exchange Availability Price: Get a Quote Refurbished with installation and warranty System can be reconfigured to match …
TīmeklisThe Lam 9600 is intended to etch aluminum metal and TiW layers with highly vertical sidewalls suitable for 0.35 um linewidth. The plasma is a medium-high density, …
TīmeklisThe high density, low pressure RIE reactor platform for all experiments is a Lam Research TCP 9400SE. The upper chamber transformer coupled plasma (TCP) generation subsystem supplies 13.56 MHz radio frequency (rf) power through a matching network to a planar spiral coil. All experiments etch 150mm undoped poly … summer sister missionary dressesTīmeklisWe have extensive expertise with LAM equipment and LAM parts, for which we provide service, support, technical assistance, and refurbishment. We also sell … pale blue wild flowerTīmeklisOverview. Lampoly is a Transformer Coupled Plasma (TCP) etcher, generates a uniform, high density plasma for selective etching of silicon and polysilicon. It has two … summersis gst bocesTīmeklisLam Alliance 4 9600 Etcher, 6" 2x Ch LL Alliance 4 Chamber 1 Alliance 9600SE Chamber 2 Alliance 9600SE Turbos no included 1995 Vintage 0RUH 3KRWRV RQ … summers irrigationTīmeklisThe following step Online Course is optional: Online Course for general information about the online training. Go to Online Nano Course Login to log in directly to the course. Go to "nano@stanford" and then to the "Dry Etching" section for the three videos on plasma etching principles and to "Choosing a Dry Etching Process" section for ... pale blue wool coats for womenTīmeklislam 9600 metal etch vat valve pm 102210.docx 1 vacuum chamber pm technique vat series 65 pendulum valve in-place objective: to effectively pm the vat series 65 … pale blue wool coatsummers interiors american fork